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Interaction of energetic tin ions with the Ru capping layer of EUV mirrors for nanolithography.

Holleman, Eva (2018) Interaction of energetic tin ions with the Ru capping layer of EUV mirrors for nanolithography. Bachelor's Thesis, Applied Physics.

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Abstract

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Item Type: Thesis (Bachelor's Thesis)
Supervisor:
Supervisor nameSupervisor E mail
Hoekstra, R.A.R.A.Hoekstra@rug.nl
Degree programme: Applied Physics
Thesis type: Bachelor's Thesis
Language: English
Date Deposited: 30 Nov 2018
Last Modified: 23 Jan 2019 10:13
URI: http://fse.studenttheses.ub.rug.nl/id/eprint/18868

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