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Interaction of energetic tin ions with the Ru capping layer of EUV mirrors for nanolithography.

Holleman, Eva (2018) Interaction of energetic tin ions with the Ru capping layer of EUV mirrors for nanolithography. Bachelor's Thesis, Applied Physics.

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Abstract

De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.

Item Type: Thesis (Bachelor's Thesis)
Supervisor name: Hoekstra, R.A.
Degree programme: Applied Physics
Thesis type: Bachelor's Thesis
Language: English
Date Deposited: 30 Nov 2018
Last Modified: 23 Jan 2019 10:13
URI: https://fse.studenttheses.ub.rug.nl/id/eprint/18868

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