Holleman, Eva (2018) Interaction of energetic tin ions with the Ru capping layer of EUV mirrors for nanolithography. Bachelor's Thesis, Applied Physics.
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Abstract
De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.
Item Type: | Thesis (Bachelor's Thesis) |
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Supervisor name: | Hoekstra, R.A. |
Degree programme: | Applied Physics |
Thesis type: | Bachelor's Thesis |
Language: | English |
Date Deposited: | 30 Nov 2018 |
Last Modified: | 23 Jan 2019 10:13 |
URI: | https://fse.studenttheses.ub.rug.nl/id/eprint/18868 |
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