Veringa Weiler, Thomas (2020) Energetic tin ions traversing a hydrogen gas: Electron exchange reactions. Bachelor's Thesis, Applied Physics.
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Abstract
EUV light, made by a laser produced plasma of tin ions, provides the next step in the chip manufacturing process. To ensure a long lifetime for the collector mirror situated inside the laser, hydrogen gas is used as a stopping gas for the high energy tin ions inside the laser chamber. This thesis provides a first look into the reaction products from the charge exchange between high energy tin ions and hydrogen gas molecules. Additionally, it presents insight into how the setup can be improved upon to acquire more accurate results.
| Item Type: | Thesis (Bachelor's Thesis) |
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| Supervisor name: | Hoekstra, R.A. and Schlatholter, T.A. |
| Degree programme: | Applied Physics |
| Thesis type: | Bachelor's Thesis |
| Language: | English |
| Date Deposited: | 16 Sep 2020 09:42 |
| Last Modified: | 16 Sep 2020 09:42 |
| URI: | https://fse.studenttheses.ub.rug.nl/id/eprint/22797 |
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