Benedictus, Teije Frits (2020) Energetic ions traversing hydrogen gas: Time of Flight and Wien Filter spectrometry. Bachelor's Thesis, Applied Physics.
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Abstract
The use of EUV light is an important step in the chip manufacturing process. This EUV light is created by laser produced plasma of tin ions. To collect and focus these photons, a collector mirror is placed around the plasma. Hydrogen gas is added to the source chamber to reduce the impact of high energy tin ions on this collector mirror. This thesis provides a look into the Time of Flight and Wien Filter spectrometry methods as possible methods to get insights on the energy and charge state of tin ions after the collision with the hydrogen gas. This is done by using Matlab calculations for the Time of Flight distribution, which is compared to the bunch length of the chopper sweeper system. Simulations of the Wien Filter are done using SIMION and the resulting energy distributions for the different setups are plotted.
| Item Type: | Thesis (Bachelor's Thesis) |
|---|---|
| Supervisor name: | Hoekstra, R.A. and Hoekstra, S. |
| Degree programme: | Applied Physics |
| Thesis type: | Bachelor's Thesis |
| Language: | English |
| Date Deposited: | 20 Aug 2020 19:36 |
| Last Modified: | 20 Aug 2020 19:36 |
| URI: | https://fse.studenttheses.ub.rug.nl/id/eprint/23104 |
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