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The interactions of particles produced by EUV plasma sources with multi-layer mirror targets: Sputtering of Ru target atoms by Sn projectiles

Koeleman, Sybren Arthur (2020) The interactions of particles produced by EUV plasma sources with multi-layer mirror targets: Sputtering of Ru target atoms by Sn projectiles. Master's Thesis / Essay, Applied Physics.

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Abstract

De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.

Item Type: Thesis (Master's Thesis / Essay)
Supervisor name: Hoekstra, R.A. and Schlatholter, T.A.
Degree programme: Applied Physics
Thesis type: Master's Thesis / Essay
Language: English
Date Deposited: 23 Nov 2020 09:18
Last Modified: 23 Nov 2020 09:18
URI: https://fse.studenttheses.ub.rug.nl/id/eprint/23622

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