Optimizing Sputtering Parameters of Pulsed DC Reactive Magnetron Sputtering for Depositing Si3N4 Films for an Ultra-Durable Triboelectric Nanogenerator

Smits, Brechje (2022) Optimizing Sputtering Parameters of Pulsed DC Reactive Magnetron Sputtering for Depositing Si3N4 Films for an Ultra-Durable Triboelectric Nanogenerator. Integration Project, Industrial Engineering and Management.

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Abstract

De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.

Item Type:	Thesis (Integration Project)
Supervisor name:	Pei, Y. and Jonker, G.H.
Degree programme:	Industrial Engineering and Management
Thesis type:	Integration Project
Language:	English
Date Deposited:	01 Mar 2022 10:17
Last Modified:	01 Mar 2022 10:17
URI:	https://fse.studenttheses.ub.rug.nl/id/eprint/26562

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