Dijk, Stefan van (2023) Optimal Control in EUV Lithography Lens Models. Master's Thesis / Essay, Applied Mathematics.
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Abstract
De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.
| Item Type: | Thesis (Master's Thesis / Essay) |
|---|---|
| Supervisor name: | Trenn, S. and Peypouquet, J.G. |
| Degree programme: | Applied Mathematics |
| Thesis type: | Master's Thesis / Essay |
| Language: | English |
| Date Deposited: | 24 Feb 2023 15:15 |
| Last Modified: | 24 Feb 2023 15:15 |
| URI: | https://fse.studenttheses.ub.rug.nl/id/eprint/29318 |
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