Dekker, Michiel (2024) Low energy ions scattering measurements and simulations to show the feasibility of detecting implanted particles. Master's Thesis / Essay, Applied Physics.
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Abstract
Low Energy Ion Scattering spectroscopy (LEIS) can be used for surface analysis and characterization of materials by analyzing the energy distributions of backscattered ions. Special interest goes to the possibility to detect implanted particles in the topmost layers of a target sample. To test the capability of using LEIS for detecting implanted particles in the topmost layers, experimental data sets were collected, and simulations were conducted. The experimental setup was characterized for LEIS measurements using ion beams of helium and argon projectiles of different energies and charge states. These projectiles were aimed at targets of ruthenium and molybdenum. The same collisional systems from the experiments were simulated using SRIM for both a target with and without a single monolayer of tin as topmost layer to represent implanted particles. The experimental results showed that LEIS can be used to differentiate between target materials. This is in agreement with the simulations, which showed that it can be compared to experimental data as they both follow the binary collision approximation. Also, the simulations showed that a single monolayer of tin as the top most layer should be visible in the simulated LEIS spectra.
| Item Type: | Thesis (Master's Thesis / Essay) |
|---|---|
| Supervisor name: | Hoekstra, R.A. and Schlatholter, T.A. |
| Degree programme: | Applied Physics |
| Thesis type: | Master's Thesis / Essay |
| Language: | English |
| Date Deposited: | 29 Apr 2024 10:02 |
| Last Modified: | 29 Apr 2024 10:02 |
| URI: | https://fse.studenttheses.ub.rug.nl/id/eprint/32341 |
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