Ion-Surface Interactions in EUV Lithography: Investigating Sn Implantation on Mo/Si/Ru Mirrors

Ortiz, Pedro (2025) Ion-Surface Interactions in EUV Lithography: Investigating Sn Implantation on Mo/Si/Ru Mirrors. Scientific Proposal, Nanoscience.

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Abstract

The supervisor and/or the author did not authorize public publication of the thesis.

Item Type:	Thesis (Scientific Proposal)
Supervisor name:	Hoekstra, R.A.
Degree programme:	Nanoscience
Thesis type:	Scientific Proposal
Language:	English
Date Deposited:	11 Apr 2025 06:17
Last Modified:	11 Apr 2025 06:17
URI:	https://fse.studenttheses.ub.rug.nl/id/eprint/35061

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