Velocity of ethylene glycol microdroplets in low pressure environments

Lange, Nathan de (2025) Velocity of ethylene glycol microdroplets in low pressure environments. Bachelor's Thesis, Applied Physics.

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Abstract

The aim of this research is to compare the velocity of ethylene glycol microdroplets at atmospheric pressure and in vacuum of 0.25 mbar. The motivation for this is to research the deformation of high Weber number tin microdroplets inside the EUV machines of ASML, more specific the pressure fields inside these droplets. The setup uses a microdroplet generator inside a vacuum chamber as to reduce the drag force on the microdroplets, resulting in a higher terminal velocity. Velocities were determined of droplets at atmospheric pressure and in vacuum, which are 0.349 ± 0.003 and 1.95 ± 0.02 m/s respectively. The theoretical model predicted a lower velocity for the droplet in atmospheric pressure, although the droplet in vacuum agreed with the theoretical velocity. The increased velocity of the droplets raised the Weber number from 0.3 at atmospheric pressure, to 8.9 in vacuum. In a perfectly optimised setup, Weber numbers of over 200 can theoretically be achieved. The setup is envision to be moved to Advanced Research Center for NanoLithography (ARCNL) for further research on laser-droplet interactions.

Item Type:	Thesis (Bachelor's Thesis)
Supervisor name:	Hoekstra, R.A.
Degree programme:	Applied Physics
Thesis type:	Bachelor's Thesis
Language:	English
Date Deposited:	05 Aug 2025 10:35
Last Modified:	08 Aug 2025 13:13
URI:	https://fse.studenttheses.ub.rug.nl/id/eprint/36567

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