Perez Chaher, Mariano (2021) Design of active wafer clamp model with hysteretic piezoactuator array to compensate for silicon wafer edge wear. Design Project, Industrial Engineering and Management.
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Abstract
De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.
| Item Type: | Thesis (Design Project) |
|---|---|
| Supervisor name: | Munoz Arias, M. and Jayawardhana, B. |
| Degree programme: | Industrial Engineering and Management |
| Thesis type: | Design Project |
| Language: | English |
| Date Deposited: | 11 Feb 2021 10:05 |
| Last Modified: | 11 Feb 2021 10:05 |
| URI: | https://fse.studenttheses.ub.rug.nl/id/eprint/23952 |
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