Perez Chaher, Mariano (2021) Design of active wafer clamp model with hysteretic piezoactuator array to compensate for silicon wafer edge wear. Design Project, Industrial Engineering and Management.
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Master_IEM_Design Project_2020_MarianoPerezChaher.pdf Restricted to Registered users only Download (4MB) |
Abstract
De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.
Item Type: | Thesis (Design Project) |
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Supervisor name: | Munoz Arias, M. and Jayawardhana, B. |
Degree programme: | Industrial Engineering and Management |
Thesis type: | Design Project |
Language: | English |
Date Deposited: | 11 Feb 2021 10:05 |
Last Modified: | 11 Feb 2021 10:05 |
URI: | https://fse.studenttheses.ub.rug.nl/id/eprint/23952 |
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