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Characterization of pure hafnia (HfO2) films grown by Atomic Layer Deposition (ALD)

Homan, Jeroen (2018) Characterization of pure hafnia (HfO2) films grown by Atomic Layer Deposition (ALD). Bachelor's Thesis, Chemistry.

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Abstract

De begeleider en/of auteur heeft geen toestemming gegeven tot het openbaar maken van de scriptie. The supervisor and/or the author did not authorize public publication of the thesis.

Item Type: Thesis (Bachelor's Thesis)
Supervisor name: Noheda Pinuaga, B.
Degree programme: Chemistry
Thesis type: Bachelor's Thesis
Language: English
Date Deposited: 12 Dec 2018
Last Modified: 23 Jan 2019 10:32
URI: https://fse.studenttheses.ub.rug.nl/id/eprint/18932

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