A study on the influence of molecular hydrogen on Sn covered Cu using XPS

Jong, Sjoke de (2023) A study on the influence of molecular hydrogen on Sn covered Cu using XPS. Bachelor's Thesis, Applied Physics.

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Abstract

In this work, a study on the influence of molecular hydrogen gas on a Sn-covered Cu surface is discussed. The goal of the work is to set a benchmark for future research on the interaction between hydrogen gas and Sn deposited onto Ru. The study is relevant in the context of extreme ultraviolet (EUV) lithography, which requires the use of a hot Sn plasma to create EUV light for the fabrication of computer chips. A Cu sample was prepared by cleaning it using various methods. Sn was then deposited onto the Cu sample, and X-ray Photoelectron Spectroscopy (XPS) was used to analyze the surface of the sample and determine the ratio of Sn to Cu for each deposition thickness. The Sn-covered Cu substrate was then exposed to molecular hydrogen. The results showed that the hydrogen gas exposure did not have a significant effect on the percentage of elements present in the sample. From this, it could be concluded that the hydrogen gas was not effective in removing Sn from the Cu surface. The study also found traces of Zn contamination in the Sn filament used for deposition. Further research is required to investigate the influence of molecular hydrogen on a Sn-covered Ru surface. It is expected that Ru will catalyze the formation of SnH4.

Item Type:	Thesis (Bachelor's Thesis)
Supervisor name:	Hoekstra, R.A.
Degree programme:	Applied Physics
Thesis type:	Bachelor's Thesis
Language:	English
Date Deposited:	10 Jul 2023 13:08
Last Modified:	22 Jan 2024 15:16
URI:	https://fse.studenttheses.ub.rug.nl/id/eprint/30444

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